Microfabrication technologies

Welcome to the 2024 edition of Micro-331, the course on the Fundamentals in Microfabrication.
This course includes a MOOC, classroom lectures given by Professors, exercises in groups with TA's called SLT (student led tutorials), as well as self-paced quizzes for your training.

Our two main lecture rooms are CE12 on Wednesday and CM4 on Thursday.
The lecture starts at 8h15 until 10h, with a 15 min break at 9h.

• M: MOOC
• CL: classroom
• SLT: student-led-tutorial (exercises in groups)
• TA: Teaching assistant
• AE: Student assistant (assistant étudiant)

The final exam in January is a written exam, and counts 85% of the final grade.
The course has 4 SLT sessions. The SLT counts for 15% of the final grading.
The MOOC has weekly training  quizzes for your rehearsal (ungraded).
The MOOC can be accessed on the Courseware platform. You need to sign in with your EPFL credentials. https://courseware.epfl.ch/courses/course-v1:EPFL+mems+2023/about

Wed 11 Sep / CE12
Lecture: course information

Thu 12 Sep / CM14
Finishing lecture by Prof. Brugger
MOOC (lecture room is available, several AE's will be there to help you)

Wed 18 Sep / CE12
MOOC (lecture room is available)

Thu 19 Sep / CM14
MOOC (lecture room is available)

Recommended MOOC: MEMS & Cleanroom

Wed 25 Sep / CE12
Lecture Prof. Stephanie Lacour

Thu 26 Sep / multiple rooms
SLT_1 group exercises

Recommended MOOC: MEMS & Cleanroom

Wed 2 Oct / CE12
MOOC (lecture room is available, several AE's will be there to help you)

Thu 3 Oct / CM14
Lecture Prof. Juergen Brugger

Recommended MOOC: Lithography

Wed 9 Oct / CE12
08h15-09h00: Self-studying, Prof. Brugger will be in the room to take your questions
09h15-10h00: Lecture Prof. Alexandra Radenovic "Solid-state nanopores: from fab to lab"

Thu 10 Oct / CM14
MOOC (lecture room is available, AE's will be there to assist you)

Recommended MOOC: Lithography

Wed 16 Oct / multiple rooms
SLT_2 exercises in groups

Thu 17 Oct / CM14
MOOC (lecture room is available)

Recommended MOOC: Lithography

Autumn break
no teaching

Wed 30 Oct / CE12
8h15-9h00: self-study; Prof. J. Brugger will be in CE12 and available for Q&A
9h15-10h00: Lecture Prof. Martin Gijs (topic CVD)

Thu 1 Nov / CM14
MOOC (lecture room is available, AE's will be there)

Recommended MOOC: CVD

Wed 6 Nov / CE12
starting 9h15: Lecture Prof. Juergen Brugger (topic PVD)

Thu 7 Nov / CM14
8h15-9h00: wrap up PVD from 6 Nov (Juergen Brugger)
MOOC (lecture room is available, AE's will be there for Q&A)

Recommended MOOC: CVD and PVD

Wed 13 Nov / CE12
MOOC (lecture room available, AE's will be there for Q&A)

Thu 14 Nov / multiple rooms
SLT_3 exercises in groups (topic CVD and PVD)

Recommended MOOC: PVD

Wed 20 Nov / CE12
Lecture Prof. Adrian Ionescu, Fabio Bersano and Niccolo Martino
Title: Nanofabrication of Multi-Gate Fully-Depleted Silicon-On-Insulator Nanowire Transistors for Electron Spin Qubits

Content:

Device functionality and structureProcess flowFabrication challenges of FDSOI nanowires vs bulk Si nanowires Growing of a uniform gate oxide and contacts formationPatterning of nanogates: lift-off vs etchingInsulation and encapsulation

Thu 21 Nov / CM14
MOOC (lecture room is available)

Recommended MOOC: Dry and wet etching

Wed 27 Nov / CE12
8h15 - 10h: Lecture Prof. Martin Gijs (topic dry and wet etching)

Thu 28 Nov / CM14
MOOC (lecture room is available)

Recommended MOOC: Dry and wet etching

Wed 4 Dec / CE12
MOOC (lecture room is available, AE's will be there to help you with the class material)

Thu 5 Dec / CM14
08h15-10h00: Lecture Prof. Guillermo Villanueva on Nano-electro-mechanial-systems (NEMS)

Recommended MOOC: Dry and wet etching

Wed 11 Dec / multiple rooms
SLT_4 exercises in groups (dry and wet etching)

Thu 12 Dec / CM14
Lecture Dr. Arnaud Bertsch (topic: Polymers in microfabrication) (changed!)

Recommended MOOC: Metrology

Wed 18 Dec / CE12
8h15-9h00 Lecture by Prof. J. Brugger, Topic: Metrology
9h15-10h00 Wrap-up of course with Mentimeter quizzes and exam prep

Thu 19 Dec / CM14
8h15-9h00 Lecture Prof. J. Brugger, Topic: Metrology (2nd part)
9h15-10h00 Wrap-up of course with Mentimeter quizzes and exam prep

You will find here the most updated information related to the exam.

Date: Friday 17.01.2025 from 15h15 to 18h15

Rooms: CM1105, CM1106, CM1120 (a seat map will be provided here)

The exam includes multiple choice questions and open questions, covering the chapters of the course and the lectures.

Material allowed during the exam:

• blue or black (ink) pen for writing the exam
• ruler or stencil for straight line drawing
• white eraser
• the assembled silicon cube (see PDF from MOODLE)
  
• A 2 A4 (or 1 A3) recto-verso “cheat sheet”. We highly encourage you to do it handwritten since it will help you better understand, summarize and connect all the concepts of the course. The cheat sheets will be collected at the end of the exam. Please add your name on it.