Microfabrication technologies
MICRO-331
Overview schedule:Lecture with teacher MOOC: self-...
Description
Overview schedule:
- Lecture with teacher
-
MOOC:
self-paced, lecture rooms are available and several AE's will be available
-
SLT:
exercises in groups with TA's
Week | Day / Date | Room | Lecture | MOOC | SLT |
1 | Wed / 11 Sep | CE 12 | X |
|
|
Thu / 12 Sep | CM 14 |
| X |
| |
2 | Wed / 18 Sep | CE 12 |
| X |
|
Thu / 19 Sep | CM 14 |
| X |
| |
3 | Wed / 25 Sep | CE 12 | X |
|
|
Thu / 26 Sep | Multiple* |
|
| SLT#1 MEMS & Cleanroom | |
4 | Wed / 2 Oct | CE 12 |
| X |
|
Thu / 3 Oct | CM 14 | X |
|
| |
5 | Wed / 9 Oct | CE 12 | X |
|
|
Thu / 10 Oct | CM 14 |
| X |
| |
6 | Wed / 16 Oct | Multiple* |
|
| SLT#2 Lithography |
Thu / 17 Oct | CM 14 |
| X |
| |
7 | Autumn break | no teaching |
|
|
|
8 | Thu / 30 Oct | CE 12 | X |
|
|
Thu / 1 Nov | CM 14 |
| X |
| |
9 | Wed / 6 Nov | CE 12 | X |
|
|
Thu / 7 Nov | CM 14 | X | X |
| |
10 | Wed / 13 Nov | CE 12 |
| X |
|
Thu / 14 Nov | Multiple* |
|
| SLT#3 CVD & PVD | |
11 | Wed / 20 Nov | CE 12 | X |
|
|
Thu / 21 Nov | CM 14 |
| X |
| |
12 | Wed / 27 Nov | CE 12 | X |
|
|
Thu / 28 Nov | CM 14 |
| X |
| |
13 | Wed / 4 Dec | CE 12 |
| X |
|
Thu / 5 Dec | CM 14 | X |
|
| |
14 | Wed / 11 Dec | Multiple* |
|
| SLT#4 Dry & wet etching |
Thu / 12 Dec | CM 14 | X |
|
| |
15 | Wed / 18 Dec | CE 12 | X |
|
|
Thu / 19 Dec | CM 14 | X |
|
|
* multiple (8) rooms for the 7 SLT groups
- SLT_1: CE 12 or CM 14 (which are the two lecture rooms for Wed and Thu)
- SLT_2: INF 019
- SLT_3: INF 213
- SLT_4: INM 11
- SLT_5: PH H3 31
- SLT_6: CM 0 11
- SLT_7: CM 0 13