Microfabrication technologies
MICRO-331
Sustainability in semiconductor manufacturing; white paper from industry
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Description
(for information, optional reading or browsing)
IEEE, the worldwide largest association for electrical engineers, has for the first time issued a report that describes the issues related to sustainability when dealing with wafer processing. It is an interesting collection, and a useful source of information for all those interested, and concerned, about sustainability.
Keywords are: ENVIRONMENT, SAFETY, HEALTH & SUSTAINABILITY (ESHS): ENVIRONMENTAL SUSTAINABILITY OF THE SEMICONDUCTOR FACILITIES
The reports can be downloaded here: https://irds.ieee.org/ and is attached here for your convenience.