Microfabrication technologies
MICRO-331
Question for SLT#1
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Description
Here are the 6 questions to prepare for the SLTl#1 session scheduled for next week. They are related to the 2 topics: MEMS and Cleanroom.
Please prepare the possible answers by consulting the MOOC and any other public available source. Each of you may be asked to present your solution path in your respective group. If you have questions, please send first your thoughts on ED stem.
Please prepare the possible answers by consulting the MOOC and any other public available source. Each of you may be asked to present your solution path in your respective group. If you have questions, please send first your thoughts on ED stem.
1.1. What is the working principle of an accelerometer, e.g. in your smartphone, and what are the basic steps to fabricate its key component on a silicon chip?
1.2. How can the Joule heating effect be used in the MEMS field?
1.3. What is the working principle of a microphone, e.g. in your smartphone, and what are the basic steps to fabricate it?
1.4. Why is dust a problem during microfabrication, and how are cleanrooms working to control the level of dust and how are they
classified? In which process steps is dust very critical?
1.5. Besides dust, what other types of contamination must be avoided when making electronic devices and MEMS?
1.6. Why is it important to control temperature and humidity in a cleanroom environment?