Microfabrication technologies
MICRO-331
Lithography Roadmap from industry (IRDS 2022)
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Description
(for information, optional reading or browsing)
Historically, improvements in lithography have enabled improved chip technologies. The International Roadmap for Devices and Systems (IRDS) Lithography roadmap predicts where current patterning capability can support future chip generations and where challenges and improvements are needed. It is intended to be used by semiconductor industry participants, by industry analysts, and by researchers who want or need to know how the industry will evolve in the future and what challenges need to be addressed.
The reports can be downloaded here: https://irds.ieee.org/