Scaling laws in micro & nanosystems
MICRO-470
Media
Media
General Course Information - MICRO-470
- General info about MICRO-470.Goals: i) that you ma... (Text and media area)
- Oral EXAM, Wednesday 29 January 2025In-person oral... (Text and media area)
- oral exam schedule ("liste de passage") (File)
- exam themes 2024 (File)
- References S. Chakraborty, Mechanics Over Micro... (Text and media area)
09 Sept: intro to scaling in MEMS and Lumped Element Modeling (LEM)
- Introduction to micro-470- Slides 2024 (File)
- Intro to LEM - Lumped Element Modeling 2024 v2 (File)
- method to create equivalent circuits from LEM (File)
- Video 2020- Introduction (Ph Renaud) (URL)
- video 2020- Introduction - Molecular machines video (Ph Renaud) (URL)
23 Sept: Mechanical scaling 1/2
Mechanical Scaling in MEMS part 1/2.
13h15- 15h00. mechanical scaling (slides 1-41)
at home problem set on serpentine spring (see file below)
- Mechanical Scaling slides 2024 (v 23.9.24) (File)
- Videos - Mechanical Scaling playlist (6 videos) (URL)
- Serpentine spring - problem set (File)
- Solution Ex1 (spring design) (File)
30 Sept: Mechanical scaling 2/2
Mechanical Scaling in MEMS part 2/2.
- Mechanical scaling, week 2/2 (Text and media area)
- problem set: accelerometer design (File)
- MEMS inertial sensor article (El Mansouri et al) (File)
- One possible solution for accelerometer design (File)
07 Oct: Electrostatic scaling 1/2
13h15-15h00: Electrostatic scaling 1/2
- pdf - Electrostatic scaling slides 2024 (File)
- good tutorial on MEMS sensing and resonators (File)
- Videos: ElectroStatic scaling in MEMS playlist (4 videos) (URL)
14 Oct: Electrostatic scaling 2/2.
13h15- 15h00 Electrostatic scaling pt 2/2
- problem set ES (Text and media area)
- problem ES1: comb drive vs. parallel plate (File)
- Solution: problem ES1: comb drive vs. parallel plate (File)
- problem set ES2 - resonator (File)
- Solutions: problem set ES2 - resonator (File)
28 Oct: Thermal scaling 1/2
13h15- 15h00. Thermal scaling week 1/2.
04 Nov: Thermal Scaling 2/2
on ZOOM this week, exceptionally
Thermal Scaling in MEMS pt2
13h15- 15h00. Thermal scaling week 2/2. on zoom11 Nov: Electromagnetics scaling
13h15- 15h00. ElectroMagnetics scaling
- pdf Electromagnetic scaling 2024 v2 (File)
- Videos: ElectroMAGnetic scaling in MEMS playlist (5 videos) (URL)
18 Nov: Microfluidic scaling 1/2
13h15- 15h00. MicroFluidic scaling 1/2
25 Nov: Microfluidic scaling 2/2
13h15- 15h00 Fluidics Scaling part 1/2
02 Dec: no class this week
09 Dec: Piezo & Failure mechanisms in MEMS
13h15- 15h00 Piezo scaling, and beginning Failure Modes in MEMS
16 Dec: Failure mechanisms in MEMS
13h15 - 15h00: Failure mechanisms in MEMS
- Videos: Failure Modes in MEMS playlist (2 videos) (URL)
- video- Failure mechanisms 1/2 2020 (URL)
- MEMS reliability book (Hartzell, da Silva, Shea), 2011 (File)
COMSOL ressources (from 2022)
please see Moodle Archive 2022-2023
https://moodlearchive.epfl.ch/2022-2023/course/view.php?id=15794
there is a FEM module every week, with videos, pdf, detailed tutorials
Happy modeling!