Scaling laws in micro & nanosystems
MICRO-470
MEMS inertial sensor article (El Mansouri et al)
This page is part of the content downloaded from MEMS inertial sensor article (El Mansouri et al) on Wednesday, 25 December 2024, 18:43. Note that some content and any files larger than 50 MB are not downloaded.
Description
El Mansouri et al. Microsystems & Nanoengineering ( 2019) 5:60
https://doi.org/10.1038/s41378-019-0105-y