Scaling laws in micro & nanosystems

MICRO-470

Videos: ElectroStatic scaling in MEMS playlist (4 videos)

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Description

4 videos on electrostatic scaling in MEMS (2020)

Electrostatics

23.08.2023, 13:29

Electrostatic MEMS scaling part 1/4

11.10.2020, 08:28

ES slides 1-14

intro

energy density in capacitors

Electrostatic MEMS scaling part 2/4

11.10.2020, 08:32

ES slides 15-32

Paschen curve, parallel plates actuation

Electrostatic MEMS scaling part 3/4

11.10.2020, 08:34

ES slides 33-55: DEA and Comb Drives

Electrostatic MEMS scaling part 4/4

11.10.2020, 08:35

ES Resonators. slides 56-78

ElectroStatics live 16.10.2023

16.10.2023, 15:48

slides 1-55 of 2023 edition of ElectroStatics chapter