Scaling laws in micro & nanosystems
MICRO-470
References S. Chakraborty, Mechanics Over Micro...
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References
- S. Chakraborty, Mechanics Over Micro and Nano Scales, Springer 2011 (available for EPFL members: web link)
- M. I. Younis, MEMS Linear and Nonlinear Statics and Dynamics, Springer 2011 (available for EPFL members: web link)
- Handbook of Silicon Based MEMS Materials and Technologies, 2010 Elsevier (available for EPFL members: web link)
- K. B. Lee, Principles of Microelectromechanical Systemsm (available for EPFL members: web link)
- Marc Madou, Fundamentals of Microfabrication and Nanotechnology, CRC Press; 3rd edition (2012)
- S. D. Senturia, Microsystem Design , Springer (2004)
- Ville
Kaajakari, Practical MEMS: Design of
microsystems, accelerometers, gyroscopes, RF MEMS, optical MEMS, and microfluidic systems,
2009