Nanotechnology

The course will be given as follows:

• Course: Wednesday from 08h15 to 11h00, in presence at EPFL in room GRA-332.
• Course material (slides handouts, reading assignments, ....): available below.
• Recorded videos (2020/2021): https://mediaspace.epfl.ch/channel/MICRO-530+Nanotechnology/30304
• Q&A sessions: Each teacher will be available for 1 office hours/week during the semester (tbc):
  
  • Giovanni Boero: Tuesday 18h-19h (BM-3-110) or https://epfl.zoom.us/j/9987744396
    
  • Juergen Brugger: Tuesday 18h-19h  (BM-3-107) or https://epfl.zoom.us/j/2816823612  
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Teacher: J. Brugger

This week I will start by giving an introduction to the course in general, and how it is organized. The basics of the lecture are the slides. In addition, some scientific and technological papers are provided as recommended reading assignment. It will facilitate your understanding of some of the class content and will provide a larger context. We will also form groups and set up some group-based activities that are subsequently presented and discussed in the class. Some training quizzes are provided for your self-assessment.

Teacher: G. Boero

Teacher: G. Boero

Teacher: G. Boero

Teacher: G. Boero

Teacher: G. Boero

Teacher: G. Boero

• 1st hour: status and review of group activities, information on next activities
• 2nd hour: lecture microscopy/lithography at nanoscale
• 3rd hour: lecture continued

Teacher: J. Brugger

• First 2 groups will pitch their review/research papers (use scheduler to fill out the slots)
• Class vote for paper preference.
• Lecture on nanolithography (continued)

Teacher: J. Brugger

• 08h15 lecture continued
• 09h15: Remaining groups will pitch their review/research papers; class vote for paper preference.
• 10h15: Lecture on nanolithography (continued)

Teacher: J. Brugger

• 1st hour: lecture GR A332
• 2nd hour: lecture GR A332
  
• 3rd hour: IEM seminar in BM 5.204(see below)

In the third hour today I suggest we join the EPFL-STI-IEM Seminar on a topic closely related to the course.

• Speaker: Prof. Francesc Perez-Murano;

  Francesc Perez-Murano is CSIC research professor at the Institute of Microelectronics of Barcelona.  His research activity has been centered in the development novel nanofabrication methods for nanoelectronics and nanomechanical devices, and in particular nanolithography. He has performed pioneering contributions to the field of CMOS-NEMS, including the monolithic integration of nanomechanical resonators with CMOS circuits, a pioneering work at that time. The activity has evolved from integrating silicon cantilevers up to, recently (2022) the demonstration of integrating SETs with ‘in-house’ CMOS technology.

  Presently, he is participating in several international initiatives to advance in the manufacturing of semiconductor quantum devices, and he coordinates the manufacturing pillar of the CSIC quantum technologies platform, the quantum ecosystem created by CSIC to advance the field of quantum technologies, fostering training, research and innovation.

• Affiliation: Institute of Microelectronics of Barcelona (IMB-CNM, CSIC), Campus UAB. Bellaterra. Spain
  
• Title: "Nanofabrication contributions to the future of integrated circuits: ultimate power consumption and quantum computing"
• Abstract: The dimensions of semiconductor integrated circuit devices continue to shrink, as dictated by Moore's law, to offer better performance and lower power consumption. Soon, the most advanced technologies, fueled by the enormous data processing needs of artificial intelligence, will enter the sub-nanometer nodes, which implies great difficulties in manufacturing. On the other hand, these technologies can be used to exploit quantum phenomena and thus contribute to the development of practical quantum technology.   In this presentation, I will show how new nanofabrication methods are being studied for their introduction in IC fabrication, based on bottom-up concepts such as directed self-assembly and single dopant incorporation, which, in turn enable the realization of single electron devices.
  

Teacher: J. Brugger

Lecture on Nanopatterning

• scanning probes con't and lithography using them
• nanoimprint lithography
• soft-lithography
• stencil lithography
• self-assembly and DSA (directed self assembly)
• general Q&A

Micro-530 final workshop

Schedule:

• Student groups present and discuss their research paper.
• Attendance of all group members and contribution is expected. If you have to be excused, please send an email to teacher.
• Prepare slides to upload on MOODLE (max 7-8 slides)

Presentation content (15 min max):

1. Remind topic / Review paper (1 min)
2. Present technical details from your chosen research paper (6 min)
3. Show possible relation to the Micro-530 course part (theory, applied, fabrication) (2 min)
4. Highlight what you learned by reading the paper(s), something that you liked, or disliked, something that you think the class should remember as a take away message. Just one key aspect item is sufficient. (2 min)
5. From the quiz questions that your group composed earlier, choose 1-3 questions, show them to the class, ask real-time answer, and then moderate the answer depending on the class knowledge. (2 min)