MEMS sensors practicals
MICRO-503
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MEMS practicals II, Spring semester : MEMS sensor practicals - MEMS sensors, how they work and how to use them !
Information session - Monday February 19th 2024 - 9h15 to 10h, room ?
Schedule
- Schedule (access with EPFL credentials) (URL)
- MEMS Practicals II-INTRO SESSION-SPRING 2025 (File)
- News forum (Forum)
General information
Objectifs
- Gain experience in practical methods in MEMS and microsensors
- Acquire critical thinking on simulation results related to MEMS fabrication
- Learn how to present technical results in an organized fashion
Instructions
- C - Pressure sensor (Folder)
- D - Glucose Sensor Strip (Folder)
- F - BOSCH sensor (Folder)
- G - Accelerometer (Folder)
- H - ISFET (Folder)