Advanced microfabrication practicals

MICRO-373

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Course summary

This TP allows for in-depth training on advanced micro and nanofabrication methods in a clean-room environment for selected applications, gain deeper knowledge in MEMS/NEMS processes, work in a small group together with PhD students/postdocs during 14 weeks touching all aspects of a microprocess.

This TP will be done in small groups. Each group chooses one topic.

Group Formation: Google sheet

Currently we have following 5 topics offered for spring 2026:

Topic 1: Fabrication, testing and validation of an integrated photonic chip on silicon on insulator (silicon waveguides, interferometers, ring resonators)

Weekly schedule:

  1. Theory and simulations about silicon waveguides, start of mask design in GDS using python package (week 1)
  2. Mask design in GDS using python package (week 2)
  3. E-beam lithography run for waveguide patterning (week 3)
  4. Etching of waveguides, profilometry (week 4)
  5. SEM images and AFM analysis of waveguides (week 5)
  6. E-beam lithography run for gold heaters (week 6)
  7. Gold heaters deposition and lift-off (week 7)
  8. SEM images and reflectometry analysis of the final samples (week 8)
  9. Transmission testing in the lab: waveguides (week 9)
  10. Transmission testing in the lab: ring resonators (week 10)
  11. Data analysis (Q-factor, reflectivity, transmission) and writing of report (week 11)
  12. Writing of report, short presentation (week 12)

Topic 2: The bimorph cantilever (design, fabrication, testing)

Weekly schedule:

  1. Theory (week 1), including choice for etching method (KOH, plasma, etc..)
  2. Mask design (week 2)
  3. Photolithography 1 (week 3)
  4. Cr Etch and characterization (week 4)
  5. Photolithography 2 (week 5)
  6. SiO2 plasma (week 6)
  7. Under etching for release (week 7) + Intermediate report
  8. Characterization (week 8)
  9. Characterization 2 (week 9)
  10. COMSOL simulations (week 10)
  11. Writing of report (week 11)
  12. Writing of report, short presentation (week 12-14)

Topic 3: Manufacturing a high resolution computer generated hologram (CGH) 

A CGH is a microstructured transparent element which, when illuminated by a laser (e.g laser pointer) produces an image.The CGH will be 3D printed.

Weekly schedule:

  1. Theory 2 photon polymerization & CGH desing
  2. Mask design in gds using python package (week 1)
  3. Mask design in gds using python package (week 2)
  4. Trial run of a simple structure with Nanoscribe (week 3)
  5. Trial run of design with Nanoscribe (week 4)
  6. Phase contrast image of structure (week 5)
  7. Build set up illumination in the lab (week 6)
  8. Transmission testing in the lab (week 7)
  9. Transmission testing in the lab (week 8)
  10. Data analysis (week 9): 
  11. (week 10)
  12. Writing of report (week 11)
  13. Writing of report, short presentation (week 12-14)


Topic 4: NMOS transistor: design and fabrication

Weekly schedule:

  1. Introduction transistor NMOS: design and fabrication steps (week 1)
  2. Mask design (week 2)
  3. Photolithography and alignment etching (poly-silicon gate): mask level 2 (week 3)
  4. Photolithography and etching: mask level 2 (week 4)
  5. Photolithography and etching (source/drain): mask level 3 (week 5)
  6. SiO2 PECVD, photolithography and etching (contact, Vias): mask level 4 (week 6)
  7. AlSi(1%) metal deposition and Photolithography: mask level 5 (week 7)
  8. Metal etching, optical inspection (week 8)
  9. Probing, testing (week 9)
  10. Probing, testing and SEM observation (week 10) 
  11. Writing of report (week 11)
  12. Writing of report, short presentation (week 12-14)

Topic 5: Microfluidic production of hydrogel droplets for biointerfaces

Weekly schedule:

  1. Theory: microfluidic chip design and material choice (week 1)
  2. Mask design (week 2)
  3. Photolithography and master development 1 (week 3)
  4. Photolithography and master development 2 and SEM imaging (week 4)
  5. PDMS casting and glass bonding (week 5)
  6. Trial testing of the microfluidic chips (week 6)
  7. Trial testing 2 and Intermediate report (week 7)
  8. Material preparation and production of hydrogel droplets 1 (week 8)
  9. Droplet characterisations 1 (week 9)
  10. Production 2, characterisations 2 and data analysis (week 10) 
  11. Writing of report (week 11)
  12. Writing of report, short presentation (week 12-14)




For all enrolled students, we will have an introduction session Friday 27 February 2026, in room BM 1.130 between 13h30 and 18h00.
During this introduction session:
- 13h30 to 14h45: The main aspects of the TP will be presented by the professors and TAs.
- 14h45 to 16h15: Cleanroom safety training will be organised by CMi staff.
- 16h15 to 18h00: A short visit of the CMi cleanrooms is planned under the supervision of the TAs.