Advanced microfabrication practicals
MICRO-373
Topic 2- Bimorph Cantilever - Ressources
This page is part of the content downloaded from Topic 2- Bimorph Cantilever - Ressources on Sunday, 25 January 2026, 02:34. Note that some content and any files larger than 50 MB are not downloaded.
Description
This folder contains documents related to Topic 2
Files and subfolders
- MICRO-373 - Spring2025 - maskDesign.pptx
- MICRO-373 - Spring2025 - theory.pptx
- Topic2-373 - introduction presentation.pdf
- Topic2-373-Instructions- Sping2024-Questions only - V1.pdf
- Topic2-373-Instructions-Spring2024-V1.pdf
- Topic2-373-Runcard_Spring2024_v1.pdf
- Topic2-373-Standard4.GDS
- Topic2-373-TP-process-flow.pdf
- HF_Hazards_summary.pdf
- Safety and Behavior in the Cleanroom_15BM+1 TPs.pdf
- Topic2-373-COMSOL_guidebook.pdf
- 10.1.1.455.9258.pdf
- 2017_Book_IntroductionToSolidMechanics.pdf
- Brockmeier_2012_J._Micromech._Microeng._22_125012.pdf
- EPFL_TH2359_Intro_ThermActuator.pdf
- Fang and Lo - 2000 - On the thermal expansion coefficients of thin film.pdf
- Oxidation.pdf
- Silicium_Etching.pdf
- The Silicon Cube.pdf
- Klayout_tutorial_2020.pdf
- Topic2-373-ACES_manual-Anisotropic_etching_250915.pdf
- _DEISREG.ISR
- _ISREG32.DLL
- ACES.exe
- ACES.hlp
- DeIsL1.isu
- DeIsL2.isu
- erate.dat
- Glu32.dll
- msvcp50.DLL
- Opengl32.dll
- hole_cross_100x100.bmp
- hole_square_100x100.bmp
- peg_cross_100x100.bmp
- peg_square_100x100.bmp
- spoke_146x148.bmp
- spoke_402x406.bmp
