Microfabrication technologies
MICRO-331
Media
This course includes a MOOC, classroom lectures given by Professors, graded exercises in groups with TA's called SLT (student led tutorials), a new A.I. based Tutor Bot, as well as ungraded self-paced quizzes for your training and self-assessment.
Our lecture room is CE12 on both, Wednesdays and Thursdays.
The lecture starts at 8h15 until 10h, with typically a 15 min break at 9h.
- M: MOOC
- CL: classroom
- SLT: student-led-tutorial (exercises in groups)
- TB: Tutor Bot
- TA: Teaching assistant
- AE: Student assistant (assistant étudiant)
The final exam in January is a written exam, and counts 75% of the final grade.
The course has 6 SLT sessions. The SLT counts for 25% of the final grading.
The MOOC has weekly training quizzes for your rehearsal (ungraded).
The MOOC can be accessed on the Courseware platform. You need to sign in with your EPFL credentials. https://courseware.epfl.ch/courses/course-v1:EPFL+mems+2023/about
We are using the Ed Discussion Forum for Q&A that also hosts the new A.I. based Tutor Bot.
- Overview schedule:Lecture with teacher MOOC: self-... (Text and media area)
- News forum (to be used by the teachers) (Forum)
- A.I. Tutor Bot (File)
- TA's and AE's :All the TA's and AE's have first-ha... (Text and media area)
- About SLT (student led tutorials)For the SLT we wi... (Text and media area)
- SLT groups and class information (File)
- SLT-6 registration (Choice)
- Ed Forum Survey (URL)
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Day / Date |
Room |
Activity |
Teacher(s) |
|
Wed / 10 Sep |
CE 12 |
Lecture: course information |
All |
|
Thu / 11 Sep |
CE 12 |
MOOC self-study lecture room is available several TAs/AE's will be there to help you get started Recommended MOOC: MEMS & Cleanroom |
some TA's and AE's (tbc) |
|
Day / Date |
Room |
Activity |
Teacher(s) |
|
Wed / 17 Sep |
CE 12 |
MOOC self-study lecture room is available Recommended MOOC: MEMS & Cleanroom |
|
|
Thu / 18 Sep |
CE 12 |
MOOC self-study lecture room is available Recommended MOOC: MEMS & Cleanroom |
|
Day / Date |
Room |
Activity |
Teacher(s) |
|
Wed / 24 Sep |
several rooms |
SLT_#1 in groups (graded) Topic: MEMS & Cleanroom |
TA’s and AE’s |
|
Thu / 25 Sep |
CE 12 |
MOOC self-study lecture room is available Recommended MOOC: CVD |
|
Day / Date |
Room |
Activity |
Teacher(s) |
|
Wed / 1 Oct |
CE 12 |
Lecture |
Prof. Yujia Zhang |
|
Thu / 2 Oct |
CE 12 |
MOOC self-study lecture room is available Recommended MOOC: CVD |
- MICRO-331 2025 Lecture 2 YZ (File)
- SLT#2 Chemical vapor deposition (CVD) Questions (File)
- help for SLT question 2.5 (File)
- help for SLT question 2.6 (File)
- Recording of the 2nd Lecture (URL)
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Day / Date |
Room |
Activity |
Teacher(s) |
|
Wed / 8 Oct |
several rooms |
SLT_#2 in groups (graded) Topic: CVD |
TA’s and AE’s |
|
Thu / 9 Oct |
CE 12 |
MOOC self-study lecture room is available Recommended MOOC: PVD |
|
Day / Date |
Room |
Activity |
Teacher(s) |
|
Wed / 15 Oct |
CE 12 |
Lecture |
Prof. Yujia Zhang |
|
Thu / 16 Oct |
CE 12 |
MOOC self-study lecture room is available Recommended MOOC: PVD |
Autumn break
no teaching
|
Day / Date |
Room |
Activity |
Teacher(s) |
|
Wed / 29 Oct |
several rooms |
SLT_#3 in groups Topic: PVD |
TA’s and AE’s |
|
Thu / 30 Oct |
CE 12 |
MOOC self-study lecture room is available Recommended MOOC: Lithography |
|
Day / Date |
Room |
Activity |
Teacher(s) |
|
Wed / 5 Nov |
CE 12 |
Lecture |
Minshen Zhu |
|
Thu / 6 Nov |
CE 12 |
MOOC self-study lecture room is available Recommended MOOC: Lithography |
- MICRO-331 2025 Lecture 4 YZ (File)
- Recording of Lecture 4 (URL)
- Further reading materials related to Minshen' talk (URL)
|
Wed / 12 Nov |
several rooms |
SLT_#4 in groups (graded) Topic: Lithography |
TA’s and AE’s |
|
Thu / 13 Nov |
CE 12 |
MOOC self-study lecture room is available Recommended MOOC: Dry etching |
|
Day / Date |
Room |
Activity |
Teacher(s) |
|
Wed / 19 Nov |
CE 12 |
Lecture |
Prof. J. Brugger |
|
Thu / 20 Nov |
CE 12 |
MOOC self-study lecture room is available Recommended MOOC: Dry etching |
|
Day / Date |
Room |
Activity |
Teacher(s) |
|
Wed / 26 Nov |
several rooms |
SLT_#5 in groups (graded) Topic: Dry Etching |
TA’s and AE’s |
|
Thu / 27 Nov |
CE 12 |
MOOC self-study lecture room is available Recommended MOOC: Wet etching |
|
Day / Date |
Room |
Activity |
Teacher(s) |
|
Wed / 3 Dec |
CE 12 |
Lecture |
Giuseppe Schiavone |
|
Thu / 4 Dec |
CE 12 |
MOOC self-study lecture room is available Recommended MOOC: Wet etching |
The lecture by Giuseppe Schiavone has following title and abstract:
- Title: Microfabrication of Flexible and Stretchable Neuroelectronic Interfaces
- Abstract: This lecture will give an overview on the application of microfabrication technologies to the manufacturing of neuroelectronic interfaces. Starting from the early examples of silicon-based neurotechnology, we will explore more modern microfabrication methods enabling less invasive, flexible and stretchable devices that constitute today the forefront of brain-computer-interfaces.
Speaker details: Giuseppe Schiavone
Senior Scientist
Campus Biotech B3.2 | Chemin des mines 9 | CH-1202 Geneva
|
Day / Date |
Room |
Activity |
Teacher(s) |
|
Wed / 10 Dec |
several rooms |
SLT_#6 in groups (graded) Topic: Wet Etching |
TA’s and AE’s |
|
Thu / 11 Dec |
CE 12 |
MOOC self-study lecture room is available Recommended MOOC: Metrology |
|
Day / Date |
Room |
Activity |
Teacher(s) |
|
Wed / 17 Dec |
CE 12 |
Lecture Micro for Nano class Q&A |
JB, YZh |
|
Thu / 18 Dec |
CE 12 |
Lecture self-assembly class Q&A |
JB, YZh |
additional material and information
- phyphox (URL)
- 1 - MEMS and Cleanroom Introduction_slides only (File)
- 25/09/24 Lecture on Process Flow (Folder)
- 2 - Chemical Vapor Deposition_slides only (File)
- 3 - Physical Vapor Deposition_slides only (File)
- 4 - Lithography_slides only (File)
- 5 - Dry Etching_slides only (File)
- 6 - Wet Etching_slides only (File)
- 7 - Metrology_slides only (File)
- Si Crystal (allowed for the exam) (File)
- Lithography Roadmap from industry (IRDS 2022) (File)
- Sustainability in semiconductor manufacturing; white paper from industry (File)
- Webpage of METAS, the Swiss Federal Institute of Metrology (URL)
- Hand-out slides of the MOOC sessions (Folder)
- Guide for SLT questions answering (File)
Exam Information
You will find here the most updated information related to the exam.
Date: Tuesday 20.01.2026 from 15h15 to 18h15
Rooms: CE 11, CE 12, CE 13 (a seat map will be provided here)
Material allowed during the exam:
- blue or black (ink) pen for writing the exam
- ruler or stencil for straight line drawing
- white eraser
- the assembled silicon cube (see PDF from MOODLE)
- your personal note sheet using the template provided (compliance will be checked during exam)
You are of course encouraged to work in groups to create and share the content of the 'cheat sheet', but you need to create your own personal copy.
The cheat sheets will be collected at the end of the exam. Please add your Sciper number and name on it.
- tablet, computer, smartphone, pocket calculator and any other electronic device, including drones.
- pens with other colors than blue or black
- pencils based on graphite
- your exam sheet
- the evaluation sheet
- your personal notes summary ("cheat") sheet
- Exam room assignment (File)
- Exam rules (final Jan 2026) and some suggestions (File)
- 'cheat sheet template' (File)
- Office hours during exam prepWe will set up two of... (Text and media area)
- Seat map (File)