Microfabrication technologies
MICRO-331
SLT#1 questions
Description
Questions for SLT#1 Cleanroom & MEMS (CR&MEMS)
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1.1 |
Why is the microscale important for MEMS devices? Explain common size effects in MEMS and device designs. And compare MEMS with NEMS [1]. |
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1.2 |
What types of MEMS sensors are commonly used in drones, electric vehicles, and autonomous driving? And how do they work? |
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1.3 |
What is the working principle of an accelerometer, e.g., in your smartphone, and what are the basic steps to fabricate its key component on a silicon chip? And compare the pros and cons of surface and bulk micromachining principles. |
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1.4 |
What is the working principle of a microphone, e.g., in your smartphone, and what are the basic steps to fabricate it? |
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1.5 |
How can the Joule heating effect be used in the MEMS field? |
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1.6 |
Why is dust a problem during microfabrication, and how are cleanrooms working to control the level of dust, and how are they classified? In which process steps is dust very critical? What other types of contamination and environmental parameters must be controlled when making electronic devices and MEMS? |
[1] Nanoelectromechanical systems (NEMS) are a class of devices integrating electrical and mechanical functionality on the nanoscale.