MEMS practicals I

MICRO-501

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Course summary

MEMS practicals I - Fall semester : MEMS actuator Practicals - Make a bimorph actuator in the cleanroom and characterize it !

The MEMS practicals have been designed for participation of 24 students, in groups of three (maximum possible: 36 students)-

Schedule : Groups of 3 students (the schedule will be adapted for each group)

Organisation: Arnaud Bertsch, Philippe Renaud, Giovanni Boero, Jurgen Brugger

General information

Objectives

  • Gain experience in practical methods in MEMS and microsensors
  • Acquire critical thinking on simulation results related to MEMS fabrication
  • Learn how to present technical results in an organized fashion

Sessions

GENERAL PLAN OF TP A

  • Introduction session - 09.09.24: quick introduction to TP A
  • A1 theoretical session - 23.09.24: start answering preparation questions with help of TAs. --> Answers to be submitted on 26.09.24 13h.
  • A1 Design session - 30.09.24: feedback on preparation questions - start design of cantilevers with help of TAs. --> Answers + designs to be submitted on 03.10.24  8h.
  • A2 + A3 Clean room sessions at CMi from week of October 07th  2024, according to schedule.
You'll be contacted by your TA (Berke Erbas, Roberto Russo, André Chatel, Chenxiang Zhang, Pol Torres-Vila) a few days before your clean room session to receive the information for A2/A3 (where to go, when, safety instructions). If you have any questions regarding these sessions or won't be able to attend it, directly contact your TA early enough. The schedule for cleanroom sessions with groups, dates, times, TAs is available at GDrive.

  • A4 Characterization
During A4 you will measure the resonance frequencies of the cantilevers fabricated at CMi. The results of the experiments should be compared to the analytical calculation you obtained from A1 for a first comparison. Please also bring your laptop so you can prepare the graphs and compare the results during the TP.   

  • Final report
You should upload the final report here below, 1 week after your last session of TP A4. Follow the guidelines in the instruction file.  Don't forget to include the corrected answers to the preparation questions as well as your design and simulation results from the preparation sessions (A1) in the final report. 

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EXTRA for A1 theoretical session


Jupyter notebooks - Microfabrication exercises

To make the learning experience of microfabrication processes more interactive, this year we have included exercises based on Jupyter notebooks. You are highly encouraged to use these notebooks to support your explanations in your report. If you correctly include Python simulation results in your final report, you will receive extra grades.

Access to the Notebooks:

READ THIS FIRST: By default, clicking on these links creates a folder in your noto with the content of the repository. If you have already cloned the repository before, this action merges the files from the repository by folders and subfolders, overwriting any file with the same name already present in your noto. IMPORTANT: If you click on these links, your previous work in your noto space on the corresponding notebook will be overwritten. Use this link only once, or consciously! Rename the files if you do not want to lose your work.

If you have already cloned the repository on your noto, there may be merging issues leading to cloning failures. The easiest fix is to delete the folder in noto and download the newest version. The changes you make in the notebooks in your noto space do not affect the master version in the repository or that of your fellow students. This series of notebooks is intended for exclusive use on the EPFL noto interface (noto.epfl.ch), where all the packages are pre-installed, allowing you to use the code directly without any additional setup.

Click on this link only once to download before you start. Remember, if you click on this link again, you will overwrite your work. HINT: Rename the notebook file as soon as you finish cloning to keep your work safe from accidental overwrites.

The notebook files can be accessed by cloning from Git repositories to your noto machine via the following links.