MEMS practicals I
MICRO-501
A - Technologie microactionneurs
This page is part of the content downloaded from A - Technologie microactionneurs on Wednesday, 25 December 2024, 18:43. Note that some content and any files larger than 50 MB are not downloaded.
Description
GENERAL PLAN OF TP A
- Introduction session - 09.09.24 : quick introduction to TP A
- A1 theoretical session - 23.09.24: start answering preparation questions with help of TAs. --> Answers to be submitted on 26.09.24 13h.
- A1 Design session - 30.09.24: feedback on preparation questions - start design of cantilevers with help of TAs. --> Answers + designs to be submitted on 03.10.24 8h.
- A2 + A3 Clean room sessions at CMi from week of October 7th 2024, according to schedule.
Files and subfolders
- Intro MRTP pitch.pdf
- Micro-501-TP-process-flow-Fall2024.pdf
- TP A - Fall2024 - introduction presentation.pdf
- TP A - Instructions - Fall2024 - Questions only - V1.pdf
- TP_A Runcard_Fall2024_v1.pdf
- TP_A-Standard4.GDS
- TP-A-Instructions-Fall2024-V1.pdf
- HF_Hazards_summary.pdf
- Safety and Behavior in the Cleanroom_15BM+1 TPs.pdf
- 10.1.1.455.9258.pdf
- 2017_Book_IntroductionToSolidMechanics.pdf
- Brockmeier_2012_J._Micromech._Microeng._22_125012.pdf
- EPFL_TH2359_Intro_ThermActuator.pdf
- Fang and Lo - 2000 - On the thermal expansion coefficients of thin film.pdf
- Oxidation.pdf
- Silicium_Etching.pdf
- The Silicon Cube.pdf
- Klayout_tutorial_2020.pdf
- TP_A-ACES_manual-Anisotropic_etching_250915.pdf
- _DEISREG.ISR
- _ISREG32.DLL
- ACES.exe
- ACES.hlp
- DeIsL1.isu
- DeIsL2.isu
- erate.dat
- Glu32.dll
- msvcp50.DLL
- Opengl32.dll
- hole_cross_100x100.bmp
- hole_square_100x100.bmp
- peg_cross_100x100.bmp
- peg_square_100x100.bmp
- spoke_146x148.bmp
- spoke_402x406.bmp