Thin film fabrication technologies

Course summary

• Announcements (Forum)
• Exam Schedule Th/Fr 19.6/20.6 (File)

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• Vacuum and Evaporation (Folder)

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• discharges, sputtering and ion beam processing (Folder)

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• CVD, ALD and Carbon-based thin films (Folder)

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• Nucleation and Epitaxy (Folder)

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17 April - 23 April

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• Film microstructure and residual stress (Folder)

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• Mechanical Material Properties and Hard Coatings (Folder)

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• Repetition, Q&A, virtual lab tour, (Folder)

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