MOOC: Micro and Nanofabrication (MEMS) - Spring

Welcome to the Micro-621b course, spring 2025.

This course uses a MOOC in a self-paced study, accompanied with some other learning exercises, quizzes and paper readings.

Here is an outline for the course structure:

• Groups focus on the assigned topic
• Groups create (5) quiz questions on their assigned topic (not from MOOC, based on lecture material, or papers, or free ideas)
• Quiz competition: which group is the best and fastest in solving the quiz from the other groups (4 quizzes: MEMS & CR, Litho, deposition, etching)
• Final workshop: each group presents a process flow for a device, and they introduce at least one mistake (impossible or not-favorable step, not necessarily covering the topic of your group). Other students need to identify it (will be discussed together to figure out the flaw and come up with correct version).
• Some students will not be part of groups and will have an individual oral assessment.

Based on the poll, we can start scheduling the final assessments.

We do have some students who will take an individual oral exam, and we have groups with 2 or 3 members who will be assessed in a small final workshop presentation.

For all we maintain the quiz question creation, an activity that will be launched on Moodle after the mid-term.

Individual students (taking oral exam):

Groups (assessed during final workshop(s):

The final assessment will be done according to following scheme:

(exact date and time may change and will be arranged with the class 1-2 weeks before the date)

July 15

·       Individual exam for: Utku Agtas, Yesim Koyaz, Soujanya Madasu, Alper Balkan

·       Group workshop for: Group 4 and Group 6

July 22 or 23

·       Group workshop for: Group 2, Group 3, Group 5

All groups and students are invited to attend both workshops.