Advanced MEMS & microsystems
MICRO-534
Media
Lectures will happen live in class with no recording
Recordings from previous year will be available on the moodle, but content of the course differs slightly from the last years (notably because of the departure of one lecturer). These should be considered as a support and do not replace the lectures in class.
Attendance to the Industrial Seminars is mandatory and your answers to the questions will be graded (10% of total grade). Questions (8 at 1pt each for a maximum grade of 6) and answer sheet are available on this moodle. In case you cannot attend it, you need to excuse yourself via an email with a valid justification BEFORE the seminar.
Students presentations in teams of 2 persons will be graded and will happen on 11.03.2025 (10% of total grade). Please use the ppt template provided below.
All information is provided in the lecture of the 1st week "Introduction".
MOODLE ISSUE: If a file does not open properly, to visualise it, right click the link and choose "open in a new tab / window" and then click on the file name in that window.
- Micro534 - AdvMEMS - Weekly schedule 2025 (File)
- Schedule Industrial seminars AdvMEMS2025 (File)
- Questions seminars AdvMEMS2025 (File)
- Micro534 - AdvMEMS - Template students presentations (File)
- OneDrive link to select topics for the students presentations (URL)
- News forum (Forum)
18 February: Introduction and Transducing Principles
By Danick Briand and Guillermo Villanueva
- Micro534 - AdvMEMS - Lecture 01 - Introduction - 20250218 (File)
- Micro534 - AdvMEMS - Complement Slides Transduction (File)
- Micro534 - AdvMEMS - Complement - Scaling laws and Microfabrication (File)
- Pre-recorded lecture on Transduction I (URL)
- Pre-recorded lecture on Transduction II (URL)
- Pre-recorded lecture Introduction part I Year 2021 (URL)
- Pre-recorded lecture Introduction Part II Year 2021 (URL)
25 February: MEMS Sensors
By Danick Briand
- Micro534 - AdvMEMS - Lecture 02 - Sensors Part 1 - 20250225 (File)
- Sensors Part 1 - Lecture Recording 1 (URL)
- Sensors Part 1 - Lecture Recording 2 (URL)
- Exercises MEMS Sensors AdvMEMS2025 (File)
- Solutions exercises MEMS Sensors AdvMEMS2025 (File)
4 March: MEMS Sensors
By Danick Briand
Seminar #1 Safran-Colibrys at 12h15
Form to answer questions on Industrial Seminars:
https://docs.google.com/forms/d/1D-PPqQGDI9h0Q2hgHyj4xwoY5fkz7jsyR_bP3FzBCWQ
- Micro534 - AdvMEMS - Lecture 02 - Sensors Part 2 - 20250304 (File)
- Sensors Part 1 - Lecture recording 3 & Part 2 - Lecture recording 1 (URL)
- Sensors Part 2 - Lecture Recording 2 (URL)
- 2025 SafranSensingTechnologiesSwitzerland (File)
11 March: Students presentations
By Danick Briand & Guillermo Villanueva
We are requesting a pdf copy of your presentation for grading and our archives to be sent by email.
We expect all of you participating to learn about the different selected devices by your colleagues.
All presentations given will be available in a dedicated section at the end of the moodle below.
18 March: Actuators and Optical MEMS
By Danick Briand
Seminar #2 at 12h15 Sercalo
Form to answer questions on Industrial Seminars:
https://docs.google.com/forms/d/1D-PPqQGDI9h0Q2hgHyj4xwoY5fkz7jsyR_bP3FzBCWQ
- Micro534 - AdvMEMS - Lecture 03 - Actuators and Optical MEMS- 20250318 (File)
- Optical MEMS & Actuators - Lecture Recording 1 (URL)
- Optical MEMS & Actuators - Lecture Recording 2 (URL)
- Sercalo Industrial seminar 2025 (File)
25 March: Acoustic and Ultrasonic MEMS
By Guillermo Villanueva
Seminar #3 at 12h15 Sensirion
Form to answer questions on Industrial Seminars:
https://docs.google.com/forms/d/1D-PPqQGDI9h0Q2hgHyj4xwoY5fkz7jsyR_bP3FzBCWQ
1 April: MUTs
By Guillermo Villanueva
8 April: MEMS Resonators & NEMS
By Guillermo Villanueva
15 April: Interactive Session
- 2025-04-15 - Micro534 - AdvMEMS - Interactive Session (File)
- Silicon fusion bonding for pressure sensors (File)
- Small Silicon Condenser Microphone Improved with a Backchamber with Concave Lateral Sides (File)
29 April: Thermal Microsystems and Gas Sensors
by Danick Briand
Seminar #4 at 12h15 APIX
https://docs.google.com/forms/d/1D-PPqQGDI9h0Q2hgHyj4xwoY5fkz7jsyR_bP3FzBCWQ
- Micro534 - AdvMEMS - Lecture 07 - ThermalMicrosystems GasSensors - 20250429 (File)
- Thermal Microsystems - Lecture recording (URL)
- Gas sensors - Lecture recording (URL)
- APIX EPFL 2025 (File)
6 May: Packaging
by Danick Briand
- Micro534 - AdvMEMS - Lecture 08 - Packaging 3D Integration - 20250506 (File)
- MEMS Packaging part I - Lecture recording (URL)
- MEMS Packaging part II - Lecture recording (URL)
13 May: Packaging
20 May: PowerMEMS
by Danick Briand
Seminar # 6 at 12h15 Melexis
- Micro534 - AdvMEMS - Lecture 09 - PowerMEMS - 20250520 (File)
- PowerMEMS part I - Lecture recording (URL)
- PowerMEMS part II - Lecture recording (URL)
27 May: Final session
Oral exam instructions
Friday 20.06, 20 min, CM 013
If the time slot attributed is problematic, please check with your colleagues to exchange and then inform us.
- Questions list AdvMEMS 2025 (File)
- Micro534 - AdvMEMS - Instructions Oral Exam 2025 (File)
- AdvMEMS Exam schedule 2025 v3 (File)
Students presentations
- Micro534- Duplexers (File)
- Micro534 - MEMS Oscillators (File)
- Micro534 - RF Switches (File)
- Micro534 - Surface Stress Bio-Measurements (File)
- Micro534 - Pressure Sensors (File)
- Micro534 - Silicon Photonic MEMS Switches (File)
- Micro534 - Optical MEMS Shutter Array (File)
- Micro534 - Humidity Sensors (File)
- Micro534 - Metal Oxide Gas Sensor (File)
- Micro534 - MEMS Oscillators (File)
- Micro534 - Piezoelectric Energy Harvesters (File)
- Micro534 - Thermoelectric Generator (File)
- Micro534 - MEMS Flow Sensors (File)