Advanced topics in micro- and nanomanufacturing: top-down meets bottom-up
MICRO-724
Media
Summary
This course introduces advanced fabrication methods enabling the manufacturing of novel micro- and nanosystems (NEMS/MEMS). Both top-down techniques (lithography, stenciling, scanning probes, additive techniques) and bottom-up approaches (self-assembly) are presented.
The course has a particular scheduling that you need to be aware of (see details and timing below):
- Phase 1: fill in poll to collect participants' background and interest information
- Phase 2: read assigned review papers
- Phase 3: summarize key findings of review paper in group based discussion
- Phase 4: live lessons by teachers on Campus
- Phase 5: student groups presentation and discussion
Teachers
This course in 2022 will be given by following teachers:
- Juergen Brugger (JB), Professor of Microengineering, EPFL-STI-IEM-LMIS1
- Karl Bohringer (KB) Professor; Director, Institute for Nano-Engineered Systems (NanoES), University of Washington, Seattle, WA, US
- Francesc Perez-Murano (FPM), Professor, NEMS and Nanofabrication Group, IMB-CNM (CSIC), Campus UAB, Spain
- Massimo Mastrangeli (MM), Professor, TU Delft, Fac. EEMCS, Mekelweg 4, 2628 CD Delft, The Netherlands
Participants
Groups:
- FACS
- Smallest Transistor
- Device/systems of own choice
- microLED
|
Group |
Name First Name |
Master degree topic |
Year in PhD |
EDOC |
Your PhD topic |
Your own experience |
motivation |
expectation |
Free comments |
|
3 |
Alatas Yagmur Ceren |
ME |
2nd year |
EDMI |
Development of a Microrobotic System for Deep Tissue Drug Delivery |
Cleanroom: photolithography, evaporation, sputtering, wet/dry etching, microfluidics microfabrication, SEM, FIB characterization. MEMS and microfabrication theoretical course |
Extending my knowledge on microfabrication and studying cutting-edge examples |
Learn about varieties and applications of the microfabrication techniques in more detail |
|
|
4 |
Ansari Ehsan |
EE |
3rd year |
EDMI |
Investigation of Phase Transitions in Vanadium Dioxide FETs and Non-Volatile Memories |
clean room, MEMS, nanofabrication, modelling, 2D materials |
Improve my knowledge on broader topics |
More practical subjects close to industry |
|
|
3 |
Arefi Fatemeh |
MT |
3rd year |
EDMI |
Integrated acousto-optic modulator on thin film lithium niobate |
Cleanroom, MEMS, photonic integrated circuit, microfluidics, modelling. |
Increase my knowledge in the field of microfabrication |
To gain a deep understanding of micro- and nanofabrication techniques, particularly in the context of my thesis project |
|
|
4 |
Bertot Francesco |
MT |
4th year |
EDMI |
Hybrid photonic-organic integrated devices for terahertz field sensing |
Theory, hands-on fabrication in Cami, modellong |
Expand my knowledge about advanced micro fabrication techniques |
New techniques to improve the fabrication process flow for my thesis or for future applications |
|
|
1 |
Chang Chih-Ying |
PH |
1st year |
EDPY |
unknown |
ebeam, MLA, evaporator, dry-etch, wet-etch, Josephson junction, SEM, AFM, profilometer |
deeply understanding about fabrication |
advanced fabrication methods |
I don't have the exact thesis title now. My topic is mainly focus on circuit quantum electrodynamics and quantum optic. I investigate qubits coupled to the zigzag edge of a honeycomb lattice ("photonic graphene") that supports dispersionless edge modes. |
|
2 |
Dadashi Jordehe Morteza |
CH |
3rd year |
EDMI |
In vivo continuous molecular monitoring using an aptamer-based biosensor |
Limited experience with MEMS |
To acquire advanced insights into nano/micro fabrication |
I expect to learn advanced fabrication techniques that will enable me to develop BioFETs for sensor applications. |
|
|
2 |
De Schrijver Lotte Franciska N |
Eng Phys |
3rd year |
EDMI |
Multiplexed electrochemical biosensing for continuous monitoring in interstitial fluid |
Fabrication of SiNWs in CMi |
To broaden my knowledge in micro and nano fabrication, which could potentially be applied in the phd |
To get to learn advanced techniques that address certain needs |
|
|
3 |
Domenech Alexandre Germain Philippe |
Microelectronics |
1st year |
EDMI |
Designing SPAD Imager |
Not much |
To learn about device fabrication |
At end of this course I expect to know about device fabrication details |
|
|
3 |
Gaikwad Suraj Bhimrao |
Biomed. eng. |
1st year |
EDEE |
Precise Enrichment and Quantification of Micro and Nanoscale Biological Samples |
Hands on the microfluidic chip development processes |
The topic is very interesting, and it aligns with the scientific goal of my PhD project |
start of the art techniques for the micro and nano fabrication |
|
|
4 |
Hernández Escobar Sandra |
bioE |
1st year |
EDBB |
FETs or nanostructured electrodes for neurotransmitters sensing |
Working in the cleanroom since recent |
Get to know more microfab techniques and their feasibility and know people working in the field |
Learning more microfab building techniques and getting to know new ways of fabricating |
Bachelor in Material Science Engineering |
|
1 |
Kouny Karim |
EE (Microwaves) |
1st year |
EDEE |
RF Metamaterials Filters (Locally Resonant Metamaterials) |
Beginner |
Learn and use this kind of things for my PhD |
Learn things about micro- and nanofabrication, manufacturing, MEMS, microsystems, theory, cleanroom hands-on, modelling... |
|
|
2 |
Krsic Ivan |
Eng. Phys. |
2nd year |
EDMI |
Advancing GaN-Based Power Devices: Improving Dynamic Performance, Enhancing Mobility and Increasing Breakdown Voltage |
power devices modelling, fabrication and characterization; almost all processes from CMi |
learn about processes I haven't used yet |
fabrication steps that might be useful for my projects |
|
|
1 |
Maurya Suraj Kumar |
Biomedical Eng. |
1st year |
EDEE |
Precise Enrichment and Quantification of Micro and Nanoscale Biological Samples |
Hands on the microfluidic chip development processes |
The topic is very interesting, and it aligns with the scientific goal of my PhD project |
start of the art techniques for the micro and nano fabrication |
|
|
2 |
Mazzone Luca |
MT |
3rd year |
EDMI |
GaN-based Polarization Superjunctions for high breakdown voltages |
CMi experience in manufacturing transistors and diodes |
I would like to explore new techniques and see if I can apply some of them in my PhD research |
Advanced techniques to integrate in my fabrication |
|
|
4 |
Mutschler Léo |
Materials Science |
1st year |
EDEY |
Porous medium for biphasic cooling of high performance electronics |
I took the MICRO-621 class in Spring, and I have some limited hands-on experience in litho |
I would like to strengthen my knowledge on micro/nano manufacturing to improve the quality of my PhD work |
I would like to learn about new techniques that I could apply now, as well as extending my knowledge on the subject for future works that may use those techniques |
|
|
3 |
Romano Giada |
EE Nanotech |
2nd year |
EDMI |
Engineered Capsules with Integration of Novel Endogenous Triggers and Smart Materials for In-Body Therapeutic Applications |
Theory and 3D printing hands-on |
Better understand which techniques I may use for my PhD project in the future |
Best way to shape sharp polymeric tips at the microscale |
|
|
4 |
Shen Shulang |
MT |
1st year |
EDMI |
Silicon precision doping |
hands on cleanroom fabrication |
to learn more about micro fabrication |
Learn more about the most cutting edge development of microfabrication |
|
|
3 |
Singh Prabhleen |
Microelectronics |
1st year |
EDMI |
High energy physics SPADs |
No experience in above-mentioned areas, but motivated to learn them through this course. |
To learn about the fabrication techniques from basics to the advance level. |
Lab visit and demonstration of a few fabrication techniques, and also to learn about the challenges that are generally ignored by inexperience designers. |
|
|
1 |
Vesal Rahim |
ME |
4th year |
EDEE |
Vibroacoustic control of inter-connected double-wall structures |
I have a basic level of experience on microfabrication process. |
I would like to extend my knowledge in this field to be able to miniaturize the transducers I use in my research. |
mechanical engineering |
both theoretical and practical subjects |
|
3 |
Yang Ketong |
EE |
1st year |
EMDI |
Energy-efficient Neuromorphic 2D Devices and Circuits for Edge AI Computing |
Acquired knowledge of cleanroom protocols and the manufacturing steps and processes for various devices. |
Learn more advance micro- and nanomanufacturing |
Learn more advance micro- and nanomanufacturing |
|
|
1 |
Zhang Tao |
Material Science |
2nd year |
EDMI |
Microfluidic synthesis of functional beads for advanced 3D printing |
Photolithograhy, SU8, PDMS molding in CMi |
To gain some new aspects on advanced manufacturing technologies |
Academic and industrial challenges in advanced manufacturing technologies |
|
|
2 |
Zahra Saadat Somaehsofla |
Materials Science |
3rd year |
EDMI |
Investigation of thermal and strain sensitivity of Vanadium dioxide thin films |
cleanroom, photolithography, thin film deposition |
Enhance my knowledge of microfabrication processes to be able to choose the best option for specific applications |
Understand the differences among versatile micro/nano fabrication techniques, including their benefits and limitations |
Course Info
Overview schedule 2025DateActivityCommentAug_15Deadline for registration~25 students maxAug_17PhD students upload info on their background and PhD study/status.gdrive linkAug_20Review papers will be assigned for reading
Aug_29Form groups of PhD studentsSep_01Time for literature reading, group discussion, review paper summary, in groupsupload documents to moodle (6pm)Sep_02AM: lecture JB, PM: lecture KBroom AAC 006Sep_03AM: lecture FPM, PM: lecture MMroom AAC 006
Sep_04Time for groups to prepare material for workshop presentationupload documents to moodle (6pm)Sep_05Group presenting their mini-project; discussion and feedback
All students and professors;
room AAC 014
| Mon 1 Sep | Tue 2 Sep AAC 0 06 |
Wed 3 Sep AAC 0 06 |
Thu 4 Sep | Fri 5 Sep AAC 0 14 |
|
|---|---|---|---|---|---|
| 09:15-12h | self study | JB | FPM | workshop prep | workshop |
| 15:15-18h | self study | KB | MM | workshop prep | - |
Reading assignment (review papers for all)
Please read these papers, or get at least a good overview of their content, before the course starts. You have also Monday 1 Sep all day to study, eventually in groups. In the evening you are supposed to summarize the key findings of each paper in a short Moodle assignments, and answer a couple of quiz questions.
- Vazquez-Mena et al. Resistless nanofabrication by stencils: A review (URL)
- Howell et al. Thermal Scanning Probe Lithography: A review (URL)
- Mastrangeli et al. Self-assembly from milli- to nanoscales: methods and applications (URL)
- J. Alexander Liddle et al. Lithography, metrology and nanomanufacturing. (URL)
- L. Vestraete et al. Enabling chemically amplified resists towards tight pitch EUV patterning by directed self-assembly (URL)
- Young Rag Do et al. MicroLEDs get in line (URL)
- L. Vestraete et al. paper (File)
- uploaded review paper reports (Folder)
Assignments
Lecture slides
slides will be shown here prior to the lecture
- Course introduction (File)
- JB Stencil lithography (File)
- JB t-SPL (File)
- KB slides (File)
- FPM slides (File)
- MM slides (File)