Advanced topics in micro- and nanomanufacturing: top-down meets bottom-up

MICRO-724

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Course summary


Summary

This course introduces advanced fabrication methods enabling the manufacturing of novel micro- and nanosystems (NEMS/MEMS). Both top-down techniques (lithography, stenciling, scanning probes, additive techniques) and bottom-up approaches (self-assembly) are presented.

The course has a particular scheduling that you need to be aware of (see details and timing below):

  • Phase 1: fill in poll to collect participants' background and interest information
  • Phase 2: read assigned review papers
  • Phase 3: summarize key findings of review paper in group based discussion
  • Phase 4: live lessons by teachers on Campus
  • Phase 5: student groups presentation and discussion


Teachers

This course in 2022 will be given by following teachers:


Participants

Participants profile and background

Groups:

  1. FACS
  2. Smallest Transistor
  3. Device/systems of own choice
  4. microLED

Group

Name First Name

Master degree topic

Year in PhD

EDOC

Your PhD topic

Your own experience

motivation

expectation

Free comments

3

Alatas Yagmur Ceren

ME

2nd year

EDMI

Development of a Microrobotic System for Deep Tissue Drug Delivery

Cleanroom: photolithography, evaporation, sputtering, wet/dry etching, microfluidics microfabrication, SEM, FIB characterization. MEMS and microfabrication theoretical course

Extending my knowledge on microfabrication and studying cutting-edge examples

Learn about varieties and applications of the microfabrication techniques in more detail

 

4

Ansari Ehsan

EE

3rd year

EDMI

Investigation of Phase Transitions in Vanadium Dioxide FETs and Non-Volatile Memories

clean room, MEMS, nanofabrication, modelling, 2D materials

Improve my knowledge on broader topics

More practical subjects close to industry

 

3

Arefi Fatemeh

MT

3rd year

EDMI

Integrated acousto-optic modulator on thin film lithium niobate

Cleanroom, MEMS, photonic integrated circuit, microfluidics, modelling.

Increase my knowledge in the field of microfabrication

To gain a deep understanding of micro- and nanofabrication techniques, particularly in the context of my thesis project

 

4

Bertot Francesco

MT

4th year

EDMI

Hybrid photonic-organic integrated devices for terahertz field sensing

Theory, hands-on fabrication in Cami, modellong

Expand my knowledge about advanced micro fabrication techniques

New techniques to improve the fabrication process flow for my thesis or for future applications

 

1

Chang Chih-Ying

PH

1st year

EDPY

unknown

ebeam, MLA, evaporator, dry-etch, wet-etch, Josephson junction, SEM, AFM, profilometer

deeply understanding about fabrication

advanced fabrication methods

I don't have the exact thesis title now. My topic is mainly focus on circuit quantum electrodynamics and quantum optic. I investigate qubits coupled to the zigzag edge of a honeycomb lattice ("photonic graphene")  that supports dispersionless edge modes. 

2

Dadashi Jordehe Morteza

CH

3rd year

EDMI

In vivo continuous molecular monitoring using an aptamer-based biosensor

Limited experience with MEMS

To acquire advanced insights into nano/micro fabrication 

I expect to learn advanced fabrication techniques that will enable me to develop BioFETs for sensor applications.

 

2

De Schrijver Lotte Franciska N

Eng Phys

3rd year

EDMI

Multiplexed electrochemical biosensing for continuous monitoring in interstitial fluid

Fabrication of SiNWs in CMi

To broaden my knowledge in micro and nano fabrication, which could potentially be applied in the phd

To get to learn advanced techniques that address certain needs

 

3

Domenech Alexandre Germain Philippe

Microelectronics 

1st year

EDMI

Designing SPAD Imager

Not much

To learn about device fabrication 

At end of this course I expect to know about device fabrication details 

 

3

Gaikwad Suraj Bhimrao

Biomed. eng.

1st year

EDEE

Precise Enrichment and Quantification of Micro and Nanoscale Biological Samples 

Hands on the microfluidic chip development processes 

The topic is very interesting, and it aligns with the scientific goal of my PhD project

start of the art techniques for the micro and nano fabrication

 

4

Hernández Escobar Sandra

bioE

1st year

EDBB

FETs or nanostructured electrodes for neurotransmitters sensing 

Working in the cleanroom since recent

Get to know more microfab techniques and their feasibility and know people working in the field

Learning more microfab building techniques and getting to know new ways of fabricating

Bachelor in Material Science Engineering

1

Kouny Karim

EE (Microwaves)

1st year

EDEE

RF Metamaterials Filters (Locally Resonant Metamaterials)

Beginner

Learn and use this kind of things for my PhD

Learn things about micro- and nanofabrication, manufacturing, MEMS, microsystems, theory, cleanroom hands-on, modelling...

 

2

Krsic Ivan

Eng. Phys.

2nd year

EDMI

Advancing GaN-Based Power Devices:  Improving Dynamic Performance, Enhancing Mobility and Increasing Breakdown Voltage

power devices modelling, fabrication and characterization; almost all processes from CMi

learn about processes I haven't used yet

fabrication steps that might be useful for my projects

 

1

Maurya Suraj Kumar

Biomedical Eng.

1st year

EDEE

Precise Enrichment and Quantification of Micro and Nanoscale Biological Samples 

Hands on the microfluidic chip development processes 

The topic is very interesting, and it aligns with the scientific goal of my PhD project

start of the art techniques for the micro and nano fabrication

 

2

Mazzone Luca

MT

3rd year

EDMI

GaN-based Polarization Superjunctions for high breakdown voltages

CMi experience in manufacturing transistors and diodes

I would like to explore new techniques and see if I can apply some of them in my PhD research

Advanced techniques to integrate in my fabrication

 

4

Mutschler Léo

Materials Science

1st year

EDEY

Porous medium for biphasic cooling of high performance electronics

I took the MICRO-621 class in Spring, and I have some limited hands-on experience in litho

I would like to strengthen my knowledge on micro/nano manufacturing to improve the quality of my PhD work

I would like to learn about new techniques that I could apply now, as well as extending my knowledge on the subject for future works that may use those techniques

 

3

Romano Giada

EE Nanotech

2nd year

EDMI

Engineered Capsules with Integration of Novel Endogenous Triggers and Smart Materials for In-Body Therapeutic Applications

Theory and 3D printing hands-on

Better understand which techniques I may use for my PhD project in the future

Best way to shape sharp polymeric tips at the microscale

 

4

Shen Shulang

MT

1st year

EDMI

Silicon precision doping

hands on cleanroom fabrication 

to learn more about micro fabrication

Learn more about the most cutting edge development of microfabrication

 

3

Singh Prabhleen

Microelectronics

1st year

EDMI

High energy physics SPADs 

No experience in above-mentioned areas, but motivated to learn them through this course.

To learn about the fabrication techniques from basics to the advance level.

Lab visit and demonstration of a few fabrication techniques, and also to learn about the challenges that are generally ignored by inexperience designers.

 

1

Vesal Rahim

ME

4th year

EDEE

Vibroacoustic control of inter-connected double-wall structures

I have a basic level of experience on microfabrication process.

I would like to extend my knowledge in this field to be able to miniaturize the transducers I use in my research.

mechanical engineering

both theoretical and practical subjects

3

Yang Ketong

EE

1st year

EMDI

Energy-efficient Neuromorphic 2D Devices and Circuits for Edge AI Computing

Acquired knowledge of cleanroom protocols and the manufacturing steps and processes for various devices.

Learn more advance micro- and nanomanufacturing

Learn more advance micro- and nanomanufacturing

 

1

Zhang Tao

Material Science

2nd year

EDMI

Microfluidic synthesis of functional beads for advanced 3D printing

Photolithograhy, SU8, PDMS molding in CMi

To gain some new aspects on advanced manufacturing technologies

Academic and industrial challenges in advanced manufacturing technologies

 

2

Zahra Saadat Somaehsofla

Materials Science

3rd year

EDMI

Investigation of thermal and strain sensitivity of Vanadium dioxide thin films

cleanroom, photolithography, thin film deposition

Enhance my knowledge of microfabrication processes to be able to choose the best option for specific applications

Understand the differences among versatile micro/nano fabrication techniques, including their benefits and limitations




Course Info

Overview schedule 2025DateActivityCommentAug_15Deadline for registration~25 students maxAug_17PhD students upload info on their background and PhD study/status.gdrive linkAug_20Review papers will be assigned for reading
Aug_29Form groups of PhD studentsSep_01Time for literature reading, group discussion, review paper summary, in groupsupload documents to moodle (6pm)Sep_02AM: lecture JB, PM: lecture KBroom AAC 006Sep_03AM: lecture FPM, PM: lecture MMroom AAC 006
Sep_04Time for groups to prepare material for workshop presentationupload documents to moodle (6pm)Sep_05Group presenting their mini-project; discussion and feedback
All students and professors;
room AAC 014


Schedule for lessons (in-class on EPFL-Lausanne Campus)

Mon 1 Sep Tue 2 Sep
AAC 0 06 
Wed 3  Sep
AAC 0 06
Thu 4 SepFri 5 Sep
AAC 0 14 
09:15-12h self study JB FPM workshop prep workshop
15:15-18h self study KB MM workshop prep


Reading assignment (review papers for all)

Please read these  papers, or get at least a good overview of their content, before the course starts. You have also Monday 1 Sep all day to study, eventually in groups. In the evening you are supposed to summarize the key findings of each paper in a short Moodle assignments, and answer a couple of quiz questions.


Assignments


Lecture slides

slides will be shown here prior to the lecture