Scaling in MEMS
MICRO-606
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Summary
This doctoral class covers the scaling of MEMS devices, including mechanical, thermal, electrostatic, electromagnetic, and microfluidic aspects.
Topics
- Introduction to scaling laws: scaling of classical mechanical systems, scaling of classical electrical systems, breakdown in scaling, quantum breakdown.
- Mechanical scaling: mass-spring model, mechanical noise, squeeze film effects.
- Thermal scaling: conduction, convection, dynamics, breakdown, thermal micro-actuators.
- Microfluidic scaling: liquid flow, gas flow, diffusion-mixing, surface tension,
- Electrostatic scaling: parallel plate actuators, zipping actuators, electrostatic breakdown
- Piezo-scaling
