Metrology

MICRO-428

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Course summary


Week1 - February 16: Introduction class, Système International (SI)


Week2 - February 23: Optical Metrology/1 (Optical Microscopy)


Week3 - March 2: Nanoscale Metrology/1 (SEM)


Week4 - March 9: Nanoscale Metrology/2 (AFM)


Week5 - March 16: Basic Statistics & Experimental Examples/1


Week6 - March 23: Basic Statistics & Experimental Examples/2


Week7 - March 30: Electrical Metrology/1


Week8 - April 13: Electrical Metrology/2


Week9 - April 20: Electrical Metrology/3


Week10 - Apr 27: Optical Metrology/2 (Optical Image Sensors)


Week11 - May 4: Optical Metrology/3 (SPADs)


Week12 - May 11: Quantum Metrology/1


Week13 - May 18: Quantum Metrology/2


Week NN - ...: Nanoscale Metrology/3 (Nanomagnetism)


Q&A Session - June 2026