Advanced microfabrication practicals

MICRO-373

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This TP allows for in-depth training on advanced micro and nanofabrication methods in a clean-room environment for selected applications, gain deeper knowledge in MEMS/NEMS processes, work in a small group together with PhD students/postdocs during 14 weeks touching all aspects of a microprocess.

This TP will be done in small groups. Each group chooses one topic.

Group Formation: Google sheet

Currently we have following 3 topics offered for spring 2025:

Topic 1: Fabrication, testing and validation of an integrated photonic chip on silicon on insulator (silicon waveguides, interferometers, ring resonators)

Weekly schedule:

  1. Theory and simulations about silicon waveguides, start of mask design in GDS using python package (week 1)
  2. Mask design in GDS using python package (week 2)
  3. E-beam lithography run for waveguide patterning (week 3)
  4. Etching of waveguides, profilometry (week 4)
  5. SEM images and AFM analysis of waveguides (week 5)
  6. E-beam lithography run for gold heaters (week 6)
  7. Gold heaters deposition and lift-off (week 7)
  8. SEM images and reflectometry analysis of the final samples (week 8)
  9. Transmission testing in the lab: waveguides (week 9)
  10. Transmission testing in the lab: ring resonators (week 10)
  11. Data analysis (Q-factor, reflectivity, transmission) and writing of report (week 11)
  12. Writing of report, short presentation (week 12)

Topic 2: The bimorph cantilever (design, fabrication, testing)

Weekly schedule:

  1. Theory (week 1), including choice for etching method (KOH, plasma, etc..)
  2. Mask design (week 2)
  3. Photolithography 1 (week 3)
  4. Cr Etch and characterization (week 4)
  5. Photolithography 2 (week 5)
  6. SiO2 plasma (week 6)
  7. Under etching for release (week 7) + Intermediate report
  8. Characterization (week 8)
  9. Characterization 2 (week 9)
  10. COMSOL simulations (week 10)
  11. Writing of report (week 11)
  12. Writing of report, short presentation (week 12-14)

Topic 3: Manufacturing a high resolution computer generated hologram (CGH) 

A CGH is a microstructured transparent element which, when illuminated by a laser (e.g laser pointer) produces an image.The CGH will be 3D printed.

Weekly schedule:

  1. Theory 2 photon polymerization & CGH desing
  2. Mask design in gds using python package (week 1)
  3. Mask design in gds using python package (week 2)
  4. Trial run of a simple structure with Nanoscribe (week 3)
  5. Trial run of design with Nanoscribe (week 4)
  6. Phase contrast image of structure (week 5)
  7. Build set up illumination in the lab (week 6)
  8. Transmission testing in the lab (week 7)
  9. Transmission testing in the lab (week 8)
  10. Data analysis (week 9): 
  11. (week 10)
  12. Writing of report (week 11)
  13. Writing of report, short presentation (week 12-14)


For all enrolled students, we will have an introduction session (time and date not defined yet) in room BM 1.130 between 14h15 and 18h00.
During this introduction session:
- 14h15 to 15h30: The main aspects of the TP will be presented by the professors and TAs.
- 15h30 to 17h00: Cleanroom safety training will be organised by CMi staff.
- 17h00 to 18h00: A short visit of the CMi cleanrooms is planned under the supervision of the TAs.