Physical models for micro and nanosystems
EE-536
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Welcome to the course on Physical Models for Micro and Nanosystems!
This course will present the theoretical background to physical and numeric modeling relevant to several classes of micro and nanosystems. We will cover the background in general physics together with modeling electrostatics, mechanics, MEMS and fluids using finite element analysis. Throughout the semester, students will also work on a project related to finite element modeling of a "real" device.Format and general comments
- Lectures start at 10:15. Please follow the moodle calendar for this course for up-to-date information
- Introductory lectures in ELA2
- Lecture recordings from previous years are available, will be made visible as we make progress
- Remote access to Comsol via a virtual machine https://vdi.epfl.ch, pool:STI_WINDOWS10. Installation of a local client is highly recommended. Files can be shared between the VM and your computer. More details in the next pdf file.
Grading
Projects carried out in small groups (2-4 students) with presentation and written report submitted by the last session of the semester.
Introduction
- Slides for Lecture 1 (Introduction) (File)
- Recording of Lecture 1 and 2 (2020) (URL)
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Mathematical background
Electrostatics and magnetostatics
- Slides for Lectures 2 and 3 (Electrostatics and magnetostatics) (File)
- Recording of Lecture 2 (Electrostatics) (2020, better audio) (URL)
- Recording of Lecture 2 (Electrostatics) (2021) (URL)
- Recording of Lecture 3 (Magnetostatics) (2020, better audio) (URL)
- Recording of Lecture 3 (Magnetostatics) (2021) (URL)
- Levitating frog movie (File)
- Levitating tomato (File)
Introduction to finite elements modeling
- Slides for Lecture 4 (Introduction to FEM) (File)
- Recording of Lecture 4 (Introduction to FEM) (2021) (URL)
- Recording of Lecture 4 (Introduction to FEM; 2020 edition, better audio) (URL)
- Exercise 1: Parallel plate capacitor - Instructions (File)
- Exercise 1: Parallel plate capacitor - Comsol model file (File)
- Comsol File from session on 17.10.2022 (File)
- Recording of Comsol Session 1 (Exercise 1) (URL)
- Recording of Comsol session 1 (Exercise 1; 2020 edition) (URL)
Introduction to finite elements modeling - part 2
- Comsol file - Exercise 1 - Session 2 Start (File)
- Comsol file - Exercise 1 - Session 2 Start (File)
- Exercise 1 - Part 2 - Instructions (File)
- Comsol file - Exercise 1 - Part 2 (File)
- Exercise 2: Self-heating in a wire - Instructions (File)
- Recording of Comsol session 2 (Exercise 1, part 2; Exercise 2) (URL)
- Recording of Comsol session 2 (Exercise 1, part 2; Exercise 2; 2020 edition) (URL)
Finite element modeling for NEMS/MEMS
- Recording of Comsol session 3 (Exercises 3,4,5) (URL)
- Exercise 3: Simple cantilever bending (File)
- Exercise 3: Simple cantilever bending - Comsol File (File)
- Exercise 4: Beam getting deformed by a cylinder (File)
- Exercise 4: Beam getting deformed by a cylinder - Comsol file (File)
- Exercise 5: Electrical and mechanical coupling (File)
- Exercise 5: Electrical and mechanical coupling - Comsol model file (File)
Micro- and nanoelectromechanical systems
- Slides for Lecture 5 (MEMS and NEMS) (File)
- Recording of Lecture 5 (NEMS and MEMS) (URL)
- References for chapter 5 (Folder)
X and gamma-ray imaging devices
- Slides for Lecture 6 (X and gamma-ray imaging devices) (File)
- Recording of Lecture 6 (X and gamma ray detectors; 2020 edition) (URL)
- Paper with Ramo's theorem (File)
Microsystems for biology (heat and fluid transport)
- Slides for Lecture 7 (Microsystems for biology) (File)
- Recording of Lecture 7 (Fluids; 2020 edition) (URL)
- Recording of Lecture 8 (Heat transport; 2020 edition) (URL)
- Recording of Comsol session 4 (Exercises 6 and 7) (URL)
- Exercise 6 - Fluids between parallel walls - instructions (File)
- Exercise 7 - Flow past a cylinder - instructions (File)
- Exercise 8 - heat sink - instructions (File)
- Exercise 8 - heat sink - geometry model file (File)