Moodle 2024-2025
Lab in nanoelectronics
EE-490(i)
References
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References
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Files and subfolders
ACS200_Manual.pdf
mla150.convert.pdf
MLA150.manual.pdf
Tepla 300 Manual.pdf
Williams and Muller - 1996 - Etch rates for micromachining processing.pdf
Williams et al. - 2003 - Etch rates for micromachining processing-Part II.pdf